D60A (Stand-alone) & SK-W60ABVP

D60A (Stand-alone) & SK-W60ABVP

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Manufacturer: DiaNippon Screen

Model: D60A&amp;nbsp;(Stand-alone) &amp; SK-W60ABVP (interfaced to Nikon i-line stepper).

Condition :fully functional and were thoroughly purged with IPA and DI water, so re-installation should not be a problem.

System No. 1 :D60A 4" wafer, robot track load, (2) coat modules, (2) bake modules, (2) develop modules.

System No. 2:SK-W60ABVP 60700-63&amp;nbsp;2002, touch screen, 4" wafer, robot track load (2) coat modules, (2) bake modules, (2) develop modules with embedded controller.

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