* Four Point Probe Resistivity Mapping System with Temperature Compensation and Wafer Handler. * Cassette to cassette measurement. * Display modes include contour maps, 3-D plots and diameter scans. * Can compensate sheet resistance measurements against ambient temperature and materials TCR. * 50mm - 200mm Wafers, <5mohms/sp to > Megohm/sp * Measurement Range * Typical Measurement Time: 3.5 - 4.5 Seconds per Test Site * <0.2%(1sigma) Measurement Repeatability * Thermal Chuck Temperature Measurement Accuracy:+/-0.5'C * PC based System * X-Y Map: Up to 1200 Sites Programmable, Probe * Qualification: 20 sites * 1-30 Programmable Routines Test Sites (ASTM Standard Tests Included) * 115V, 50/60 Hz.
