Amount: 6 sets

      &nbsp ;        & nbsp;    Description for reference only(One of the unit).

* Configured for 6" wafers
* Classic control system
* Bulkhead mount system
* Momentary EMO
* Hine 38A open cassette SEND indexer
* Belt driven load station
* Standard load station shuttle spatula

* 6-gas box configuration
* Standard gas box
* Rear gas panel exhaust
* [5Ra] gas weldment polish
* Unit mass flow controllers
Gas 1: Ar (1 slm)
Gas 2: CF4 (50 sccm)
Gas 3: CHF3 (50 sccm)
Gas 4: He (1 slm)
Gas 5: Ar (200 sccm)
Gas 6: N2 (100 sccm)
UPC: He (50 sccm)
* AC input box (fuses)
* 400 Khz RF po