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Dry Asher Etcher RIE ICP Equipment > Tegal 901e /903e Plasma Etcher
Please contact us by sales@globalnanotechequipment.com for more information.
Manufacturer:Tegal< /p>
Condition:Refurbished to OEM SPEC (Installation and warranty are optional)
Price:Contact Us Now
Location:California,USA
Amount: 6 sets
Please contact us by h ttp://www.globalnanotechequipment.com sales@globalnanotechequipment.com for more information.
Description for reference only(One of the unit).
Cassette To Cassette In-line Single Wafer Plasma Etcher.Capability to etch vias and contacts with anisotropic or sloped profiles.For etching silicon dioxide, silicon nitrides, and poly
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